히터사업부

200MM Ultima Side Coil Heater

200MM Ultima Side Coil Heater

Power 208V 5.4kW
Process HDP-CVD
Process temp ≤135℃
Material Cu
Maker GPK
200MM Ultima Top Heater Plate

200MM Ultima Top Heater Plate

Power 208V 4.8kW
Process HDP-CVD
Process temp ≤135℃
Material Al
Maker GPK
200MM Ultima Ground Shield

200MM Ultima Ground Shield

Power 1.6kW
Process HDP-CVD
Process temp ≤135℃
Material Al
Maker GPK
300MM Ultima Side Coil Heater

300MM Ultima Side Coil Heater

Power 208V 4.8kW
Process HDP-CVD
Process temp ≤135℃
Material Cu
Maker GPK
200MM Ultima Side Coil Heater

200MM Ultima Side Coil Heater

Power 208V 5.4kW
Process HDP-CVD
Process temp ≤135℃
Material Cu
Maker GPK
300MM Ultima Top Heater Plate

300MM Ultima Top Heater Plate

Power 208V 8.3kW
Process HDP-CVD
Process temp ≤135℃
Material Al
Maker GPK
300MM Ultima Ground Shield Heater

300MM Ultima Ground Shield Heater

Power 208V 5.4kW
Process HDP-CVD
Process temp ≤135℃
Material Al
Maker GPK
300MM DAS2000 HEATER CHUCK

300MM DAS2000 HEATER CHUCK

Power 208V 1.5kW
Process Asher
Process temp ≤ 250˚c
Material Al
Maker GPK
6in Electrostatic Heater Chuck

6in Electrostatic Heater Chuck

Power 208V 3.9kW
Process Etching
Process temp ≤150˚c
Material Al
Maker GPK
Ti/TiN MOCVD HEATER 12

8in Electrostatic Heater Chuck

Power Etching
Process HDP-CVD
Process temp ≤250˚c
Material Al+SUS
Maker GPK
12in Electrostatic Heater Chuck

12in Electrostatic Heater Chuck

Power 208V 1.5kW
Process Etching
Process temp ≤250˚c
Material Al+SUS
Maker GPK
200MM GASONIC HEATER

200MM GASONIC HEATER

Power 208V 1.2kW
Process Asher
Process temp ≤ 250˚c
Material Al
Maker GPK