히터사업부 – ㈜지피케이 – 반도체 장비 개발,생산 전문업체

히터사업부

200MM Ultima Side Coil Heater

200MM Ultima Side Coil Heater

Power	208V 5.4kW
Process	HDP-CVD
Process temp	≤135℃
Material	Cu
Maker	GPK

200MM Ultima Top Heater Plate

200MM Ultima Top Heater Plate

Power	208V 4.8kW
Process	HDP-CVD
Process temp	≤135℃
Material	Al
Maker	GPK

200MM Ultima Ground Shield

200MM Ultima Ground Shield

Power	1.6kW
Process	HDP-CVD
Process temp	≤135℃
Material	Al
Maker	GPK

300MM Ultima Side Coil Heater

300MM Ultima Side Coil Heater

Power	208V 4.8kW
Process	HDP-CVD
Process temp	≤135℃
Material	Cu
Maker	GPK

200MM Ultima Side Coil Heater

200MM Ultima Side Coil Heater

Power	208V 5.4kW
Process	HDP-CVD
Process temp	≤135℃
Material	Cu
Maker	GPK

300MM Ultima Top Heater Plate

300MM Ultima Top Heater Plate

Power	208V 8.3kW
Process	HDP-CVD
Process temp	≤135℃
Material	Al
Maker	GPK

300MM Ultima Ground Shield Heater

300MM Ultima Ground Shield Heater

Power	208V 5.4kW
Process	HDP-CVD
Process temp	≤135℃
Material	Al
Maker	GPK

300MM DAS2000 HEATER CHUCK

300MM DAS2000 HEATER CHUCK

Power	208V 1.5kW
Process	Asher
Process temp	≤ 250˚c
Material	Al
Maker	GPK

6in Electrostatic Heater Chuck

6in Electrostatic Heater Chuck

Power	208V 3.9kW
Process	Etching
Process temp	≤150˚c
Material	Al
Maker	GPK

Ti/TiN MOCVD HEATER 12

8in Electrostatic Heater Chuck

Power	Etching
Process	HDP-CVD
Process temp	≤250˚c
Material	Al+SUS
Maker	GPK

12in Electrostatic Heater Chuck

12in Electrostatic Heater Chuck

Power	208V 1.5kW
Process	Etching
Process temp	≤250˚c
Material	Al+SUS
Maker	GPK

200MM GASONIC HEATER

200MM GASONIC HEATER

Power	208V 1.2kW
Process	Asher
Process temp	≤ 250˚c
Material	Al
Maker	GPK

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