히터사업부

200MM Ultima Side Coil Heater
Power | 208V 5.4kW |
Process | HDP-CVD |
Process temp | ≤135℃ |
Material | Cu |
Maker | GPK |

200MM Ultima Top Heater Plate
Power | 208V 4.8kW |
Process | HDP-CVD |
Process temp | ≤135℃ |
Material | Al |
Maker | GPK |

200MM Ultima Ground Shield
Power | 1.6kW |
Process | HDP-CVD |
Process temp | ≤135℃ |
Material | Al |
Maker | GPK |

300MM Ultima Side Coil Heater
Power | 208V 4.8kW |
Process | HDP-CVD |
Process temp | ≤135℃ |
Material | Cu |
Maker | GPK |

200MM Ultima Side Coil Heater
Power | 208V 5.4kW |
Process | HDP-CVD |
Process temp | ≤135℃ |
Material | Cu |
Maker | GPK |

300MM Ultima Top Heater Plate
Power | 208V 8.3kW |
Process | HDP-CVD |
Process temp | ≤135℃ |
Material | Al |
Maker | GPK |

300MM Ultima Ground Shield Heater
Power | 208V 5.4kW |
Process | HDP-CVD |
Process temp | ≤135℃ |
Material | Al |
Maker | GPK |

300MM DAS2000 HEATER CHUCK
Power | 208V 1.5kW |
Process | Asher |
Process temp | ≤ 250˚c |
Material | Al |
Maker | GPK |

6in Electrostatic Heater Chuck
Power | 208V 3.9kW |
Process | Etching |
Process temp | ≤150˚c |
Material | Al |
Maker | GPK |

8in Electrostatic Heater Chuck
Power | Etching |
Process | HDP-CVD |
Process temp | ≤250˚c |
Material | Al+SUS |
Maker | GPK |

12in Electrostatic Heater Chuck
Power | 208V 1.5kW |
Process | Etching |
Process temp | ≤250˚c |
Material | Al+SUS |
Maker | GPK |

200MM GASONIC HEATER
Power | 208V 1.2kW |
Process | Asher |
Process temp | ≤ 250˚c |
Material | Al |
Maker | GPK |
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